capable of <= 25 nm and <= 8 nm overlay using KrF 248 nm and ArF 193 nm wavelength DUV light source respectively. The ArF with resolution <= 65 nm is roughly equivalent to ASML 1450. Another one with resolution <= 28 nm, its performance is still undergoing evaluation. Overlay 8 nm is used in 20 nm node, this one is used in <= 10 nm node.

Published in the 2024 edition of major technology equipment catalog by Ministry of Industry and Information Technology. We already know this don't we? We're just waiting for this official acknowledgement.